System-Level Modeling and Simulation of MEMS-Based Sensors | Kashif Virk, Jan Madsen, Mohammad Shafique, Aric Menon
| | Abstract | The growing complexity of MEMS devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for MEMS design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the existing embedded system design methodologies is possible.
In this paper, we present a MEMS design methodology that uses VHDL-AMS based system-level model of a MEMS device as a starting point and combines the top-down and bottom-up design approaches for design, verification, and
optimization. The capabilities of our proposed design methodology are illustrated through the design of a microaccelerometer. | | Keywords | MEMS, Sensors, Wireless Sensor Networks, ystem-Level Model, Reduced-Order Model, Microaccelerometer, VHDL-AMS, SystemC | | Type | Conference paper [With referee] | | Conference | IEEE International Multi-Topic Conference (INMIC) | | Year | 2005 Month December | | Publisher | IEEE | | Address | New York, USA | | Publication link | http://ieeexplore.ieee.org | | BibTeX data | [bibtex] | | IMM Group(s) | Computer Science & Engineering |
|