Modelling and Estimation of Wafer Yields and Defect Densities from Microelectronic Test Structure Data | C. K. Hansen, P. Thyregod
| | Type | Journal paper [With referee] | | Journal | Quality and Reliability International | | Year | 1996 Vol. 12 pp. 9-17 | | BibTeX data | [bibtex] | | IMM Group(s) | Mathematical Statistics |
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