@ARTICLE\{IMM1996-02690, author = "C. K. Hansen and P. Thyregod", title = "Modelling and Estimation of Wafer Yields and Defect Densities from Microelectronic Test Structure Data", year = "1996", pages = "9-17", journal = "Quality and Reliability International", volume = "12", editor = "", number = "", publisher = "", url = "http://www2.compute.dtu.dk/pubdb/pubs/2690-full.html" }