@CONFERENCE\{IMM2005-04386,
    author       = "K. Virk and J. Madsen and M. Shafique and A. Menon",
    title        = "System-Level Modeling and Simulation of {MEMS-}Based Sensors",
    year         = "2005",
    month        = "dec",
    keywords     = "{MEMS,} Sensors, Wireless Sensor Networks, ystem-Level Model, Reduced-Order Model, Microaccelerometer, {VHDL-AMS,} SystemC",
    booktitle    = "{IEEE} International Multi-Topic Conference (INMIC)",
    volume       = "",
    series       = "",
    editor       = "",
    publisher    = "IEEE",
    organization = "",
    address      = "New York, {USA}",
    url          = "http://ieeexplore.ieee.org",
    abstract     = "The growing complexity of {MEMS} devices and their increased used in embedded systems (e.g., wireless integrated sensor networks) demands a disciplined aproach for {MEMS} design as well as the development of techniques for system-level modeling of these devices so that a seamless integration with the existing embedded system design methodologies is possible.

In this paper, we present a {MEMS} design methodology that uses {VHDL-AMS} based system-level model of a {MEMS} device as a starting point and combines the top-down and bottom-up design approaches for design, verification, and
optimization. The capabilities of our proposed design methodology are illustrated through the design of a microaccelerometer."
}